Evaluation and test trial model, low cost and space-saving
| Micro Labo-PS | |
| Machine Dimension |
H: 1600mm |
| Weight | Appx. 170kg |
| Power | 3 Phase 200V, 10kVA |
| Compress air | 0,4 - 0,7 MPa 1NL/min |
| Process gas | H2, He, Ar, N2 |
| Other | Emmision duct |
| Process | Halt processing, batch process |
| Max. work size | 120 x 100m |
| Process side | Single side |
| Function |
Improve Wettability |
| Application | For laboratory, R&D purpose |
- Simple model with limited function for labo and R&D purpose.
- It is suitable to test and research the several kinds of parameters, also measurement of temparature and resistance data during the processing.
- With original 3 step process, pre-heat, low pressure dry and plasma process, system realized high quality processing by low temparature and short process time.
- With hydric plasma process, the material that is tend to be oxidized such as copper, is also able to process while the reduction.
Simple process
Widely open door enable to set the work and process easily such as Microwave oven.
Simple operation by setting the process time and select the plasma conditon, and push start button to start the processing.
Wide range of plasma condition from low to high temparature, this is the suitable system for laboratory and R&D.