R220W

Roll to roll both side plasma processing with high performance and productivity

 

R220W

 

R220W
Machine Dimension

H: 1600mm
W: 2200mm
D: 1500mm
Weight Appx. 3000kg
Power 3 Phase 200V, 50kVA
Cooling water Single system, difference between in/out over 0,1MPa, 50NL/min.
Compress air 0,5 - 0,7 MPa 10NL/min.
Process gas O2, Ar, CF4, N2, H2
Other Emmision duct
Process Roll to Roll
Max. work size Width 520mm x  200m roll (Custom available)
Process side Double side
Function

Improve Wettability
Improve Peel strength
Improve Ashesion Strength
Etsching
Reduce
Application Mass production

 

  • High speed and homogeneous processing by the plasma scan direct to the work. 
  • 600m width reactor specialized for the wide range processing.
  • High performance for Ashing and other surface treatment. 

 

Example: Ashing of polyimide film

Result of the processing of Length 20m, width 500mm, thickness 0,05mm. 

 

example1

 

Material: Polyimide (Kapton®EN)
Average processing qty: 0,709m
Homogeneousness: ± 9,31%

High performance and homogeneousness to the direction of rolling, also the direction to plasma unit. 

World top class performance by the Ashing rate and homogeneousness.